- ÖÐÎÄ
- English



2018Äê9Ôµף¬ÓÉÉòÑôÍØ¾£¿Æ¼¼ÓÐÏÞ¹«Ë¾×ÔÖ÷ÑÐÖÆµÄ12Ó¢´çÔ×Ó²ã³Á»ý£¨Atomic Layer Deposition£¬ALD£©É豸ͨ¹ýÁ˿ͻ§µÄÑéÊÕ¡£
ALDÉ豸ÊǼ¯³ÉµçÂ·ÖÆ±¸¹ý³ÌÖйؼüµÄ±¡Ä¤³Á»ýÉ豸£¬±»ÊÓΪÏȽø°ëµ¼Ì幤ÒÕ¼¼Êõ·¢Õ¹µÄ¹Ø¼ü»·½ÚÖ®Ò»¡£Íؾ£¹«Ë¾»ùÓÚÒÑͨ¹ýÉú²úÑéÖ¤µÄ¸ß²úÄÜPECVDÉ豸ƽ̨£¬³É¹¦ÑÐÖÆÁ˹úÄÚÊ×̨Á¿²úÐÍ12Ó¢´çALDÉ豸£¬²¢Ñ¸ËÙÍÆÏòÊг¡£¬¿ÉÓ¦ÓÃÓÚ28nmÒÔÉϼ«´ó¹æÄ£¼¯³Éµç·£¬OLED¼°ÏȽø·â×°£¨TSV£©ÁìÓò£¬Í¶ÈëÏȽøÉú²úÏߣ¬ÓÃÓÚ³Á»ýSiO2£¬SiNxµÈ¾øÔµ±¡Ä¤¡£¸ÃÉ豸Òѳɹ¦½øÈëÊÔÉú²úÏß¿¼ºËÑéÖ¤£¬Àúʱ3¸ö¶àÔ£¬Í¨¹ýÁ˿ͻ§µÄ¿¼ºËÑéÊÕ£¬É豸¸÷ÏîÐÔÄÜÖ¸±ê¾ùÂú×ãÒªÇó£¬ÇÒ´ïµ½»ò³¬¹ýÁ˹ú¼ÊͬÀà²úÆ·µÄÏȽøË®Æ½£¬ÕâÊÇÎÒ¹úÔÚʵÏÖ°ëµ¼Ìå×°±¸¹ú²ú»¯½ø³ÌÖеÄÓÖÒ»ÖØ´óÍ»ÆÆ¡£
